heating mocvd reactor with induction

induction heating MOCVD reactor vessel

Induction heating Metalorganic Chemical Vapor Deposition (MOCVD) reactors is a technology aimed at improving heating efficiency and reducing harmful magnetic coupling with the gas inlet. Conventional induction-heating MOCVD reactors often have the induction coil located outside the chamber, which can result in less efficient heating and potential magnetic interference with the gas delivery system. Recent … Read more

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